中文名称:PRX™-505 Remover
英文名称:PRX™-505 Remover
品类:其他
生产商:陶氏
CAS号:
产品介绍:PRX™-505是一种先进的蚀刻后残留物去除剂,用于等离子体灰化后的晶圆上的铝互连结构。
PRX™-505 is an advanced post-etch residue remover for aluminum interconnect architectures on post plasma ashed wafers.
优点:在室温下使用兼容自动化单晶圆工具无需中间冲洗典型属性颜色:透明无色闪点:93°C(200°F),闭杯pH:6供货情况:亚太地区欧洲北美
Advantages:
Used at room temperature
Compatible with automated single-wafer tools
No intermediate rinse required
Typical Properties
Color: Clear Colorless
Flash Point: 93°C (200°F), Closed Cup
pH: 6
Availability:
Asia Pacific
Europe
North America